һִԼ˵ɷݣ
һ̽ EPMA 
һ͸۽ʹֱСһ΢£ɹѧ΢ԤѡõĴϣʹĸԪؼӦxףչ׺̽ϵͳգx׵ĲǿȿԲⶨԪؼ
̽΢΢΢ĳɷ־зԪطΧ㣬ȸߣ׼ȷٺͲص㡣ԡˣڸ
(1)ұѧ ұȴУϳֵĴ΢ࡢƫȣõ̽Զǽֱӷذѷӻȡ(2)ʺͿѧ ̽ڵʿѧеӦҲǳ㷺ϸɺͽṹ(3) ̽볣о뵼Լе΢ʡ̽벻ƷڿҲӺܹؼá⣬ҽѧҲõ㷺Ӧá
ȷ
ȷڳ¶£α֮¶Ȳ¶ȹϵһּȷƷα֮²(T)¶Ȼʱı仯ϵDTAУƷ¶ȵı仯תӦЧӦġ
ӰȷҪأ1.պѹѡ2.ʵѡ3.Ԥһ㾡ܼˡƷĿ100Ŀ-200Ŀҡ4.αѡ񣺳æ-(Al2O3)չþMgOʯӢɰα5.ֽٵѡ
ȷҪӦڸ߾о1.ⶨ߾Ĳת䡣2.߾ڿͶе3.о߾е庬TgӰ졣4.ṹо5.оάȡȵȡ۵¶ȡ
͸΢
͸羵þ۽ΪԴ䵽ĳһ۲΢СϣʹöԵ͸ıĤʾ󲿷ֵӴ͸ǿȷֲ۲ò֯ṹһһӦתӫʾò֯ṹӦͼ
  ͼĳĶԴĶȣĶȺλĶȡ
  ͸΢һָ߷ֱʣֱʿɴ01nm߷Ŵ80򱶣΢ʺϹ۲ͷϵòṹеλλŵȾȱݡ
  ͸羵ҪȽΪ100-200nmʮnmģԵ͸ ֣ϸĩһĲϱĤøͷϱòĸĤ

